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using the same process that was used to make a single transistor (and package and attach connecting leads to it)...

...to make an entire circuit (and package and attach connecting leads to it)...

is the invention of the integrated circuit

and photolithography made that possible. It subsequently had a large number of important follow on innovations, but which were conceptually proper subsets of it.

had some other process made integrated circuits possible, that other process would have subsequently had many important innovations.

what flowed from photolithographic chip making is still flowing today.



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